Thursday, July 15, 2010
Global Foundries goes to EUV litho at 15nm
Global Foundries goes to EUV litho at 15nm
Let me remind you, standard EUV wavelength is 13nm. A lot of advantages over current 193nm light sources.
However, I am not quite sure how transistor gate will function at that nano size.
Let me remind you, standard EUV wavelength is 13nm. A lot of advantages over current 193nm light sources.
However, I am not quite sure how transistor gate will function at that nano size.
THIS LINK posted by Joseph Bell : 8:27 AM
